Substrate processing apparatus

Details Substrate processing apparatus Substrate processing apparatus

1998-04-14

2000-01-11

Spisich, Mark

Brushing, scrubbing, and general cleaning

Machines

Brushing

15 882, 15102, 414433, 414936, 134153, 134902, A46B 1304

Patent

active

060121920

ABSTRACT:
A substrate processing apparatus which includes a substrate retention mechanism having retention rollers, including a plurality of driving rollers, for holding a substrate by abutting the retention rollers against different peripheral edge portions of the substrate, and a rotative driving mechanism for rotating the plurality of driving rollers. The plurality of driving rollers preferably include a pair of driving rollers generally opposed to each other diametrically of the substrate to be held. Further, the retention rollers preferably all serve as the driving rollers.

REFERENCES:
patent: 5351360 (1994-10-01), Suzuki et al.
patent: 5566465 (1996-10-01), Hearne
patent: 5860181 (1999-01-01), Maekawa et al.
patent: 5916366 (1999-06-01), Ueyama et al.

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