Substrate processing apparatus

Details Substrate processing apparatus Substrate processing apparatus

2006-09-26

2010-10-05

Trieu, Van T. (Department: 2612)

Communications: electrical

Condition responsive indicating system

Specified indicator structure

C340S691500, C204S192120

Reexamination Certificate

active

07808396

ABSTRACT:
It is intended to provide a substrate processing apparatus capable of reliably informing a running state of the apparatus. The substrate processing apparatus100having a signal indicator for indicating the running state, including a signal indicator306capable of setting at least one operation condition under which the signal indicator306operates as well as of operating under any one of a plurality of operation conditions and a display unit314capable of displaying that a cause of the operation is any one of the operation conditions during the operation of the signal indicator306.

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