Coating apparatus – Work holders – or handling devices
Patent
1998-10-05
2000-11-21
Edwards, Laura
Coating apparatus
Work holders, or handling devices
118 52, 118 56, 118320, 118730, 427240, 134902, 134153, 269 21, B05C 1302, B05B 1302, B05D 724, B25B 1100
Patent
active
061497274
ABSTRACT:
A spin holder has a disk-like supporting portion, and a circular wall portion for supporting the back side of a substrate is formed inside the periphery of the top surface of the disk-like supporting portion. A circular groove is formed near the periphery of the top surface of the disk-like supporting portion, the circular groove surrounding the outside of the circular wall portion. An O ring is fitted into the circular groove. The top surface of the circular wall portion on the spin holder supports the back side of the substrate and the O ring comes in close contact with the back side of the substrate. Even if a vacuum leakage occurs between the circular wall portion and the back side of the substrate due to suction force created by a vacuum suction source, the O ring keeps the hermetic state in the space between the circular wall portion and the O ring. This prevents mist around the spin holder from being drawn toward the suction surface between the O ring and the substrate.
REFERENCES:
patent: 4603867 (1986-08-01), Babb et al.
patent: 4968375 (1990-11-01), Sato et al.
patent: 5572786 (1996-11-01), Rensch
patent: 5908661 (1999-07-01), Batcheldor et al.
Ogura Hiroyuki
Sanari Takuya
Yoshioka Katsushi
Dainippon Screen Mfg. Co,. Ltd.
Edwards Laura
Lorengo J. A.
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