Substrate processing apparatus

Details Substrate processing apparatus Substrate processing apparatus

1996-09-27

1997-12-30

Coe, Philip R.

Brushing, scrubbing, and general cleaning

Machines

Brushing

134 61, 134902, B08B 704

Patent

active

057016275

ABSTRACT:
A single transport path for transporting a substrate between the cassettes and a plurality of processing units, is arranged between the cassette storing means and the processing means. Hence, it is possible to skip some processing units or to change the order of the processing units easily, with simplifying the construction of the apparatus. Furthermore, the single transport path causes to reduce the space for transporting the substrate.

REFERENCES:
patent: 4208760 (1980-06-01), Dexter et al.
patent: 4985722 (1991-01-01), Ushijima et la.
patent: 5092011 (1992-03-01), Gommori et al.
patent: 5168887 (1992-12-01), Thompson et al.
patent: 5345639 (1994-09-01), Tanoue et al.
patent: 5445171 (1995-08-01), Ohmori et al.

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