Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2011-07-05
2011-07-05
Luu, Thanh X (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C356S237400
Reexamination Certificate
active
07973300
ABSTRACT:
It is intended to achieve a high level of positioning accuracy for a substrate assuming a two-layer structure constituted with a transparent layer with a high level of light transmissivity and a nontransparent layer with a low level of light transmissivity. A substrate positioning device according to the present invention characterized in that only the edge of the nontransparent layer, not the edge of the transparent layer, is exclusively detected and the substrate is positioned based upon the detection results.
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patent: 5781230 (1998-07-01), Nguyen et al.
patent: 6071796 (2000-06-01), Voutsas
patent: 6323954 (2001-11-01), Halter
patent: 6-45226 (1994-02-01), None
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patent: 10-199809 (1998-07-01), None
patent: 2006-19388 (2006-01-01), None
Takahashi Hiroyuki
Tokida Chikara
Luu Thanh X
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
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