Abrading – Machine – Rotary tool
Reexamination Certificate
2007-01-02
2007-01-02
Hail, III, Joseph J. (Department: 3723)
Abrading
Machine
Rotary tool
C451S041000, C451S286000, C451S287000, C451S288000
Reexamination Certificate
active
10481591
ABSTRACT:
There is provided a substrate polishing machine which comprises a polishing surface and a substrate carrier for holding a substrate and bringing it into contact with the polishing surface. The substrate carrier comprises a carrier body, a substrate holding member for holding a substrate with a surface of the substrate to be polished being directed towards the polishing surface. The substrate holding member is mounted on the carrier body in such a manner that the substrate holding member is movable both towards and away from the polishing surface. The substrate polishing machine further comprises a substrate holding member positioning device provided on a side of the substrate holding member opposite to that used for holding the substrate. The substrate holding member positioning device has a flexible member which defines a chamber, and which, upon introduction of a non-compressible fluid, is expanded in a direction towards the polishing surface.
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Fukushima Makoto
Kojima Shunichiro
Nabeya Osamu
Namiki Keisuke
Noji Ikutaro
Ebara Corporation
Hail III Joseph J.
McDonald Shantese
Westerman, Hattori, Daniels & Adrian , LLP.
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