Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2008-04-01
2008-04-01
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S053000, C355S072000
Reexamination Certificate
active
07352440
ABSTRACT:
A method for determining an offset between a center of a substrate and a center of a depression in a chuck includes providing a test substrate to the depression, the test substrate having a dimension smaller than a dimension of the depression, measuring a position of an alignment mark of the test substrate while in the depression, and determining the offset between the center of the substrate and the center of the depression from the position of the alignment mark.
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Cuperus Minne
Hoogendam Christiaan Alexander
Nijmeijer Gerrit Johannes
Van Eijck Petrus Anton Willem Cornelia Maria
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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