Substrate mounting structure and substrate processing apparatus

Details Substrate mounting structure and substrate processing apparatus Substrate mounting structure and substrate processing apparatus

2011-06-14

2011-06-14

Hassanzadeh, Parviz (Department: 1716)

Coating apparatus

Gas or vapor deposition

With treating means

C118S715000, C118S722000, C118S724000, C156S345510, C156S345520

Reexamination Certificate

active

07959734

ABSTRACT:
A substrate mounting structure that can maintain the temperature uniformity of a substrate mounted on a mounting stage. The substrate mounting structure disposed in a pressure reduced space has a base portion, a pillar portion mounted in a standing manner on the base portion and having an internal space, and a mounting stage supported on the pillar portion and having a substrate mounted thereon. The mounting stage has a heating element that heats the mounted substrate, and a thermal breaking unit that mechanically breaks an electrical power supply line connected to the heating element depending on the temperature of the substrate. The pillar portion is comprised of a thin-walled cylinder. The thermal breaking unit is disposed on the pillar portion's internal space side in the mounting stage, and the pressure in the internal space is reduced.

REFERENCES:
patent: 4894634 (1990-01-01), Nezuka et al.
patent: 5968379 (1999-10-01), Zhao et al.
patent: 6756568 (2004-06-01), Furukawa
patent: 7045747 (2006-05-01), Futakuchiya et al.
patent: 2003/0057198 (2003-03-01), Kobayashi et al.
patent: 2004/0168641 (2004-09-01), Kuibira et al.
patent: 2006/0169688 (2006-08-01), Mori et al.
patent: 2003-124201 (2003-04-01), None

Affiliated with

Also associated with

Rating

Substrate mounting structure and substrate processing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate mounting structure and substrate processing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate mounting structure and substrate processing apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2684705