Optics: measuring and testing – Position or displacement
Reexamination Certificate
2011-03-15
2011-03-15
Nguyen, Sang (Department: 2886)
Optics: measuring and testing
Position or displacement
C356S630000, C356S237200
Reexamination Certificate
active
07907289
ABSTRACT:
A substrate measuring stage used for a curve measuring system measuring a curve of the substrate and an ordinary measuring system measuring each of or one of a physical quantity and a chemical quantity of the substrate other than the curve, may include the mounting board movable between an ordinary measurement position for the ordinary measuring system and a retreat position away from and downward of the ordinary measurement position; the plurality of support pins insertable into through-holes provided in the mounting board and fixed to a curve measurement position for the curve measuring system; and a drive mechanism vertically moving the mounting board between the ordinary measurement position and the retreat position. The curve measurement position is set between the ordinary measurement position and the retreat position.
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Hamada Motoaki
Mizuta Masao
Cantor & Colburn LLP
Horiba Ltd.
Nguyen Sang
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