Substrate loading/unloading apparatus for manufacturing a...

Handling: hand and hoist-line implements – Utilizing fluid pressure – Venturi effect

Reexamination Certificate

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Details

C294S902000, C414S941000

Reexamination Certificate

active

06860533

ABSTRACT:
A substrate loading/unloading apparatus include a body part, an arm part connected to the body part for loading/unloading a substrate, a finger connector connected to the arm part, and a plurality of finger parts connected to the finger connector, wherein each of the finger parts include a plurality of protrusions to contact a bottom surface of the substrate.

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