Substrate loading and unloading station with buffer

Details Substrate loading and unloading station with buffer Substrate loading and unloading station with buffer

2005-03-22

2005-03-22

Krizek, Janice L. (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S217100, C414S939000, C414S940000

Reexamination Certificate

active

06869263

ABSTRACT:
A substrate processing apparatus having a station for loading and unloading substrates from the apparatus, includes an aperture closure for sealing a loading and unloading aperture of the station, apparatus for removing a door of a substrate magazine and thus opening the substrate magazine, and for operating the aperture closure to open the aperture, and an elevator for precisely positioning the open substrate magazine along a vertical axis within a usable range of motion. The station may also include a sensor for mapping locations of the substrates, and a mini-environment for interfacing the station to a substrate processing system.

REFERENCES:
patent: 4674939 (1987-06-01), Maney et al.
patent: 4676709 (1987-06-01), Bonora et al.
patent: 4758127 (1988-07-01), Imai et al.
patent: 4895486 (1990-01-01), Baker et al.
patent: 4917556 (1990-04-01), Stark et al.
patent: 4995430 (1991-02-01), Bonora et al.
patent: 5139459 (1992-08-01), Takahashi et al.
patent: 5291923 (1994-03-01), Gallagher et al.
patent: 5380682 (1995-01-01), Edwards
patent: 5387265 (1995-02-01), Kakizaki et al.
patent: 5388944 (1995-02-01), Takanabe
patent: 5407350 (1995-04-01), Iwabuchi
patent: 5418382 (1995-05-01), Blackwood et al.
patent: 5431600 (1995-07-01), Murata et al.
patent: 5509772 (1996-04-01), Doche
patent: 5540098 (1996-07-01), Ohsawa
patent: 5551830 (1996-09-01), Watanabe et al.
patent: 5570990 (1996-11-01), Bonora et al.
patent: 5605428 (1997-02-01), Birkner et al.
patent: 5772386 (1998-06-01), Mages et al.
patent: 5788447 (1998-08-01), Yonemitsu et al.
patent: 5857848 (1999-01-01), Takahashi et al.
patent: 5882165 (1999-03-01), Maydan et al.
patent: 5980183 (1999-11-01), Fosnight
patent: 6012894 (2000-01-01), Watanabe et al.
patent: 6013920 (2000-01-01), Gordon et al.
patent: 6071059 (2000-06-01), Mages et al.
patent: 6318945 (2001-11-01), Hofmeister
patent: 6410455 (2002-06-01), Kuribayashi
patent: 452939 (1991-10-01), None
patent: 574893 (1993-12-01), None
patent: 2696429 (1994-04-01), None
patent: 62258881 (1987-11-01), None
patent: 1291442 (1989-11-01), None
patent: 1310686 (1989-12-01), None
patent: 269955 (1990-03-01), None
patent: 3261161 (1991-11-01), None
patent: 479347 (1992-03-01), None
patent: 485813 (1992-03-01), None
patent: 4360545 (1992-04-01), None
patent: 4206547 (1992-07-01), None
patent: 4505234 (1992-09-01), None
patent: 4302454 (1992-10-01), None
patent: 5338728 (1993-05-01), None
patent: 632449 (1994-02-01), None
patent: 6151266 (1994-05-01), None
patent: 6211311 (1994-06-01), None
patent: 6302679 (1994-10-01), None

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