Image analysis – Applications – Manufacturing or product inspection
Patent
1996-05-30
1998-05-19
Boudreau, Leo
Image analysis
Applications
Manufacturing or product inspection
324770, 345904, G06K 900, G01R 3100, G09G 336
Patent
active
057546789
ABSTRACT:
A method for inspecting a substrate having a plurality of output pixels using an image sensing device having a plurality of input pixels includes the steps of capturing an input image of a plurality of groups of output pixels with a plurality of groups of input pixels, each group of input pixels capturing a group of output pixels, each input pixel in a group of input pixels having a position, inhibiting modulation contributions from input pixels in the input image, forming a plurality of images from the plurality of groups of input pixels in the input image, each image including input pixels from a similar position in each group of input pixels, detecting defects in each of the plurality of images, and determining defects in sub-pixels of the substrate in response to the defects detected in each of the plurality of images.
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Hiroyuki Aoki, "New Testing Technology of LCD Panel Tester", SEMICON/Kansai 95 FPD Technology Symposium Proceedings, Jun. 23, 1995 (Translation included).
Hawthorne Jeffrey A.
Setzer Joseph
Boudreau Leo
Mehta Bhavesh
Photon Dynamics, Inc.
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