Optical: systems and elements – Light interference – Produced by coating or lamina
Reexamination Certificate
2006-04-11
2006-04-11
Chang, Audrey (Department: 2872)
Optical: systems and elements
Light interference
Produced by coating or lamina
C359S586000, C257S098000, C257S013000, C372S043010
Reexamination Certificate
active
07027225
ABSTRACT:
Distributed Bragg reflectors may be formed in fewer layers by the method, which is capable of producing greater differences in indexes of refraction. Group III–V alternating layers are deposited. The microstructure of alternating layers is controlled to be different. A combination of alternating polycrystalline layers or amorphous and polycrystalline layers results. Alternate ones of the layers oxidize more quickly than the others. A lateral wet oxidation of the alternate ones of the layers produces a structure with large differences in indexes of refraction between adjacent layers. The microstructure between alternating layers may be controlled by controlling Group V overpressure alone or in combination with growth temperature.
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Cheng Keh-Yung
Hsieh Kuang-Chien
Chang Audrey
The Board of Trustees of the University of Illinois
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