Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
Reexamination Certificate
2009-06-04
2011-11-08
Chambliss, Alonzo (Department: 2892)
Active solid-state devices (e.g., transistors, solid-state diode
Alignment marks
C438S401000, C438S462000
Reexamination Certificate
active
08053910
ABSTRACT:
To provide a semiconductor substrate whose columnar member for alignment is difficult to fall off and a manufacturing method thereof. An alignment mark24(columnar member for alignment) and protection posts26surrounding the alignment mark24to protect the alignment mark are disposed in an alignment mark forming region14of a semiconductor wafer101(semiconductor substrate). Each of the protection posts has a diameter (maximum diameter) of, for example, 0.6 μm. The protection posts26are arranged such that the diameter of each of the columnar protection posts26is greater than a diameter (for example, 0.2 μm) of the alignment mark24. That is, the protection posts26are arranged such that the contact area between each of the protection posts26and an underlayer thereof (dummy wire layer22) is greater than the contact area between the alignment mark24and an underlayer thereof (dummy wire layer22).
REFERENCES:
patent: 2004/0238973 (2004-12-01), Wakisaka et al.
patent: 2007/0164432 (2007-07-01), Wakisaka et al.
patent: 2007116203 (2007-05-01), None
patent: 2007-220870 (2007-08-01), None
Terashima Tomoyuki
Uchida Hirokazu
Chambliss Alonzo
Oki Semiconductor Co., Ltd.
Volentine & Whitt PLLC
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