Substrate housing container

Details Substrate housing container Substrate housing container

2011-01-25

2011-01-25

Levi, Dameon E (Department: 2841)

Electricity: electrical systems and devices

Housing or mounting assemblies with diverse electrical...

For electronic systems and devices

C361S796000, C361S756000, C361S802000, C206S707000, C206S710000, C206S706000, C206S711000, C211S041170, C211S041180

Reexamination Certificate

active

07876575

ABSTRACT:
The present invention includes a ceiling portion8, bottom portion9, a substrate housing portion3formed by a side walls5to7, a plurality of wafer slots11arrayed in parallel on the inner surface of the side walls6and7, a slit portion12formed in an extended manner along the array direction of the wafer slots11on each of a second side wall6and a third side wall7, a slide portion18movably arrayed along each of the slit portions12, a plurality of substrate securing pieces arrayed with substantially the same intervals with the intervals of the wafer slots11on the inner surface of the slide portion18, in which, with the slide portion being in a substrate securing position, the substrate housing pieces press and secure the substrate on the wafer slot11, and in a substrate securing releasing position, the substrate housing pieces move separately from a circumferential portion of the substrate and releases a securing state of the substrate. In accordance with the present invention, it is possible to provide a substrate housing container which is able to hold the wafer in a predetermined position even in a case in which the substrate housing container is moved in which a lid body is released.

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patent: 7559730 (2009-07-01), Song
patent: 2008/0257779 (2008-10-01), Kurikawa

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