Supports: racks – Special article – Platelike
Patent
1994-10-11
1998-07-28
Gibson, Jr., Robert W.
Supports: racks
Special article
Platelike
206454, A47F 700, B65D 8530
Patent
active
057851867
ABSTRACT:
A modular, transportable for storing substrates, such as semi-conductor wafers and masks, and for maintaining such substrates in a substantially clean environment. Substrates are supported within the housing by a plurality of combs which maintain the substrates in spaced relationship relative to each other. Access to the interior of the housing is permitted by a pivotal door assembly. A docking unit permits interface of the housing with a clean environment. Control circuitry provided in the docking unit detects the presence of a housing and loads/unloads the housing as directed by a host computer through a communication link. A memory device is preferably mounted to the housing for storing history and other information about the substrates within the housing. The host computer directs the control circuitry to retrieve the substrate information from the memory and relay the information to the host computer. During or after processing of the substrates, the host computer updates the memory as desired. In this manner, the host computer controls and tracks one or more docking units and associated substrate housings.
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Babbs Daniel A.
Shultz Richard E.
Gibson , Jr. Robert W.
Progressive System Technologies, Inc.
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