Substrate holding technique

Details Substrate holding technique Substrate holding technique

2007-05-01

2007-05-01

Barrera, Ramon M. (Department: 2832)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000, C269S008000, C335S286000, C335S289000, C335S290000

Reexamination Certificate

active

10941962

ABSTRACT:
An object holding apparatus including a chuck for holding an object, a holder configured to hold the chuck, a generator provided in the holder and configured to generate a field related to an attraction force, a member provided in the chuck and configured to be attracted by the generator in accordance with the field, and a support configured to support one of the generator and the member. The support is configured to allow the one to move toward the other and away from the other, and the support includes a leaf spring.

REFERENCES:
patent: 6266133 (2001-07-01), Miyajima et al.
patent: 6320649 (2001-11-01), Miyajima et al.
patent: 6323935 (2001-11-01), Ebihara et al.
patent: 6583859 (2003-06-01), Miyajima et al.
patent: 2003/0040831 (2003-02-01), Tanaka et al.
patent: 11-288099 (1999-10-01), None
patent: 3076727 (2000-06-01), None
patent: 2003-142393 (2003-05-01), None

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