Substrate holding technique

Details Substrate holding technique Substrate holding technique

2011-08-16

2011-08-16

Barrera, Ramon (Department: 2832)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000, C269S008000, C335S286000, C335S289000, C335S290000

Reexamination Certificate

active

07999919

ABSTRACT:
Disclosed is technology for holding a substrate and, specifically, an object holding apparatus including a chuck for holding an object, a holding unit for holding the chuck, a generating unit provided in the holding unit, for generating a field related to an attraction force, a member provided in the chuck and attracted by the generating unit in accordance with the field, and a supporting unit for supporting one of the generating unit and the member, for movement at least in a direction nearing the other and in a direction away from the other.

REFERENCES:
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patent: 6583859 (2003-06-01), Miyajima et al.
patent: 2003/0040831 (2003-02-01), Tanaka et al.
patent: 11-288099 (1999-10-01), None
patent: 3076727 (2000-06-01), None
patent: 2003-142393 (2003-05-01), None

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