Substrate holding system and exposure apparatus using the same

Details Substrate holding system and exposure apparatus using the same Substrate holding system and exposure apparatus using the same

1997-01-27

1999-07-13

Rutledge, D.

Photocopying

Projection printing and copying cameras

Step and repeat

355 73, 269 21, G03B 2742, G03B 2760

Patent

active

059234083

ABSTRACT:
A substrate holding system for holding a substrate by attraction through a negative pressure, has protrusions for supporting the substrate, including a primary protrusion of annular shape disposed around a substrate lifting pin and secondary protrusions distributed around the primary protrusions, and an arrangement for reducing a local change in shape of the substrate in a portion around the primary protrusion as the substrate is attracted by the negative pressure.

REFERENCES:
patent: 4522489 (1985-06-01), Bouwer
patent: 5324012 (1994-06-01), Aoyami et al.
patent: 5374829 (1994-12-01), Sakamoto et al.
patent: 5563683 (1996-10-01), Kamiya

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