Substrate holding device, semiconductor manufacturing...

Details Substrate holding device, semiconductor manufacturing... Substrate holding device, semiconductor manufacturing...

2006-01-03

2006-01-03

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

06982784

ABSTRACT:
A substrate holding device includes a base member capable of removably holding a plate having a contact member to come into contact with a substrate, and a sensor that identifies an identification sign provided on the plate.

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