Substrate-holding device for testing circuit arrangements on...

Details Substrate-holding device for testing circuit arrangements on... Substrate-holding device for testing circuit arrangements on...

2005-03-08

2005-03-08

Zarneke, David (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

C324S758010

Reexamination Certificate

active

06864676

ABSTRACT:
A substrate-holding device is designed as a one-piece ceramic element having a number of variably heavily doped layer regions. At least one layer region is a conductive region and at least one layer region is an insulative region. A multilayer chuck structure is thereby formed which does not exhibit mechanical surface interfaces between the layers.

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