Abrading – Abrading process – Glass or stone abrading
Patent
1998-07-01
2000-10-24
Rose, Robert A.
Abrading
Abrading process
Glass or stone abrading
451288, 451398, B24B 722
Patent
active
061358584
ABSTRACT:
A substrate holding device includes a frame member for holding a substrate on an open side of the frame member, the open side being formed by a recess in the frame member, a plurality of fluid chambers disposed concentrically in the recess of the frame member, a respective wall face on the substrate holding side of the frame member at least partially defining each fluid chamber, each wall face being formed by a deformable resilient film, a controller for separately controlling the pressure inside of each of the fluid chambers, and at least one guide ring disposed adjacent to a respective one of the plurality of fluid chambers on the substrate holding side of the frame member, the at least one guide ring being movable relative to the frame member by varying the pressure inside a respective fluid chamber.
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patent: 5486129 (1996-01-01), Sandhu et al.
patent: 5584751 (1996-12-01), Kobayashi et al.
patent: 5605488 (1997-02-01), Ohashi et al.
patent: 5720845 (1998-02-01), Liu
patent: 5795215 (1998-08-01), Guthrie et al.
Canon Kabushiki Kaisha
Rose Robert A.
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