Substrate holding device and manufacturing method therefor

Details Substrate holding device and manufacturing method therefor Substrate holding device and manufacturing method therefor

1995-12-07

1997-11-11

Flanigan, Allen J.

Heat exchange

Flexible envelope or cover type

165 801, 165 804, 165185, 16510419, 165 805, 118724, 2989003, C23C 1450, F28F 2300

Patent

active

056853637

ABSTRACT:
A substrate holding device of the invention includes a base cooled with a heat absorbing fluid, a flexible sheet being extended on a surface of the base for forming a sealed portion between the sheet and the base, a heat absorbing fluid with which the sealed portion is filled, a sheet-like rubber elastic material being disposed on the sheet, and a substrate retainer for pressing fringes of a substrate, placed on the rubber elastic material, against the base. Metal elastic members may be distributed almost uniformly in the sealed portion, in place of or together with, the rubber elastic material.

REFERENCES:
patent: 4682566 (1987-07-01), Aitken
patent: 4993482 (1991-02-01), Dolbear et al.
patent: 4997032 (1991-03-01), Danielson et al.

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