Substrate holding device

Details Substrate holding device Substrate holding device

1991-03-20

1992-11-03

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

355 73, G03B 2742

Patent

active

051609614

ABSTRACT:
A device for holding a substrate includes a holding system for holding a substrate by attraction and a guard system for preventing dropping of the substrate held by the holding system, the guard system being out of contact with the substrate as the same is held by the holding system.

REFERENCES:
patent: 4282924 (1981-08-01), Faretra
patent: 4757355 (1988-07-01), Iizuka et al.
patent: 4820930 (1989-04-01), Tsutsui et al.
patent: 4854444 (1989-08-01), Iwamoto
patent: 4999506 (1991-03-01), Mizusawa et al.
patent: 5008703 (1991-04-01), Kawakami et al.

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