Substrate holding apparatus, substrate transferring robot...

Details Substrate holding apparatus, substrate transferring robot... Substrate holding apparatus, substrate transferring robot...

2011-07-19

2011-07-19

Rodriguez, Saúl J (Department: 3652)

Handling: hand and hoist-line implements

Hook, hoistline, or grab type

Locking device

C294S103100

Reexamination Certificate

active

07980611

ABSTRACT:
A substrate holding apparatus includes a base plate with a two-pronged portion, a holding plate arranged above the base plate, a driving portion provided therebetween, a holding portion formed by a tip end of the two-pronged portion and a tip end of the holding plate, and a guide portion provided at the tip end of the two-pronged portion for guiding a part of the substrate. The driving portion includes an urging means for always urging a basal end side of the holding plate upward, an electric magnetic portion for drawing the holding plate toward the base plate, and a bearing portion arranged at on the tip end side of the base plate. The guide portion has a guide groove which comes into contact with a part of a periphery of the substrate.

REFERENCES:
patent: 6913302 (2005-07-01), Yokota et al.
patent: 7611182 (2009-11-01), Kim et al.
patent: 2003/0130759 (2003-07-01), Kesil et al.
patent: 2005/0017529 (2005-01-01), Rogers et al.
patent: 2006/0043750 (2006-03-01), Wirth
patent: 2007/0216179 (2007-09-01), Hirooka et al.

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