Substrate holding apparatus, polishing apparatus, and...

Details Substrate holding apparatus, polishing apparatus, and... Substrate holding apparatus, polishing apparatus, and...

2011-06-28

2011-06-28

Morgan, Eileen P. (Department: 3723)

Abrading

Machine

Rotary tool

C451S287000, C451S288000, C451S398000

Reexamination Certificate

active

07967665

ABSTRACT:
A substrate holding apparatus prevents a substrate from slipping out and allows the substrate to be polished stably. The substrate holding apparatus has a top ring body for holding and pressing a substrate against a polishing surface, and a retainer ring for pressing the polishing surface, the retainer ring being disposed on an outer circumferential portion of the top ring body. The retainer ring includes a first member made of a magnetic material and a second member having a magnet disposed on a surface thereof which is held in abutment against the first member.

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