Substrate holding apparatus, and inspection or processing...

Details Substrate holding apparatus, and inspection or processing... Substrate holding apparatus, and inspection or processing...

2011-08-16

2011-08-16

Sohn, Seung C (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C414S331020, C257S048000

Reexamination Certificate

active

07999242

ABSTRACT:
In order to enable high accuracy positioning and strong pressing of a substrate, the present invention provides a substrate holding apparatus including: a rotating bed having an inclined surface supporting a lower side of an outer circumferential side surface of the substrate, which bed rotates on a normal line of the substrate as the rotation axis together with the substrate; a position restriction unit rotating together with the rotating bed and restricting the substrate in a predetermined position on the rotating bed by pressing a plurality of points on the circumference on an upper side of the outer circumferential side surface of the substrate prior to the rotation; and a pressing unit rotating together with the rotating bed and pressing the substrate against the inclined surface by pressing a plurality of points on the upper side of the outer circumferential side surface of the substrate during the rotation.

REFERENCES:
patent: 5951770 (1999-09-01), Perlov et al.
patent: 6677166 (2004-01-01), Hunter
patent: 6761362 (2004-07-01), Noguchi
patent: 7226055 (2007-06-01), Bettencourt et al.
patent: 7284760 (2007-10-01), Siebert et al.
patent: 7703823 (2010-04-01), Harless et al.
patent: 62-166517 (1987-07-01), None
patent: 2002-319613 (2002-10-01), None
patent: 2004-253756 (2004-09-01), None
patent: 2005-203726 (2005-07-01), None
patent: 2006-210400 (2006-08-01), None
Japanese Office Action, with English translation, issued in Japanese Patent Application No. 2006-234631, mailed Jul. 13, 2010.

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