Substrate holding apparatus and a system using the same

Details Substrate holding apparatus and a system using the same Substrate holding apparatus and a system using the same

1993-09-13

1995-07-25

Gellner, Michael L.

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

355 53, 269 21, B25B 1100

Patent

active

054366933

ABSTRACT:
A substrate holding apparatus includes a pump, serving as a suction source, a conveying chuck for holding a wafer substrate by suction, a connection arrangement, including parallel lines intermediate the connection arrangement, for conneting the pump to the chuck, and a valve arrangement including at least one valve provided in at least one of the parallel lines. By selecting one of the parallel lines by controlling opening/closing of these valves, the conductance of the connection line is adjusted, whereby the optimum suction pressure for the chuck is set.

REFERENCES:
patent: 4655584 (1987-04-01), Tanaka et al.
patent: 4872938 (1989-10-01), Davis et al.
patent: 5148214 (1992-09-01), Ohta et al.
patent: 5160961 (1992-11-01), Marumo et al.
patent: 5191218 (1993-03-01), Mori et al.
patent: 5203547 (1993-04-01), Marumo
patent: 5231291 (1993-07-01), Amemiya et al.

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