Abrading – Machine – Rotary tool
Reexamination Certificate
2006-08-01
2006-08-01
Rose, Robert A. (Department: 3723)
Abrading
Machine
Rotary tool
C451S388000
Reexamination Certificate
active
07083507
ABSTRACT:
The present invention relates to a substrate holding apparatus for holding a substrate to be polished and pressing the substrate against a polishing surface. The substrate holding apparatus comprises a top ring body for holding a substrate, an elastic pad for being brought into contact with the substrate, and a support member for supporting the elastic pad. The substrate holding apparatus further comprises a contact member mounted on a lower surface of the support member and disposed in a space formed by the elastic pad and the support member. The contact member has an elastic membrane for being brought into contact with the elastic pad. A first pressure chamber is defined in the contact member, and a second pressure chamber is defined outside of the contact member. The substrate holding apparatus further comprises a fluid source for independently supplying a fluid into, or creating a vacuum in, the first pressure chamber and the second pressure chamber.
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Fukushima Makoto
Kojima Shunichiro
Nabeya Osamu
Namiki Keisuke
Noji Ikutaro
Ebara Corporation
Rose Robert A.
Wenderoth , Lind & Ponack, L.L.P.
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