Substrate holding apparatus

Details Substrate holding apparatus Substrate holding apparatus

1995-06-05

1998-04-14

Leo, Leonard R.

Heat exchange

With retainer for removable article

Electrical component

165 804, 118728, 156345, 269 21, 269903, 279 3, F28F 700

Patent

active

057381658

ABSTRACT:
A substrate holding apparatus is provided with a plate-shaped substrated holding unit including a first surface having plural protruding portions coming into contact with a plate-shaped substrate. The apparatus is a substantially flat second surface and adapted to support the substrate on the substrate holding unit by suction and comprises a temperature regulating unit which is composed of a material of a high thermal conductivity and positioned as to contact the second surface, a heat discharging the heat from the substrate holding unit, and a heat discharge control unit for controlling the heat discharging property of the heat discharging unit. The substrate holding unit is composed of a material of a high thermal conductivity and a low thermal expansion coefficient and is formed as a thin plate smaller in volume than the temperature regulating unit, and the protruding portions are formed as small projections in order to transfer the localized heat of the substrate to the substrate holding unit through the protruding portions and a space formed by the substrate and the protruding portions.

REFERENCES:
patent: 3740900 (1973-06-01), Youmans
patent: 4361749 (1982-11-01), Lord
patent: 4457359 (1984-07-01), Holden
patent: 4721462 (1988-01-01), Collins, Jr.
patent: 5033538 (1991-07-01), Wagner et al.
patent: 5281794 (1994-01-01), Uehara et al.

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