Substrate holder, plating apparatus, and plating method

Details Substrate holder, plating apparatus, and plating method Substrate holder, plating apparatus, and plating method

2005-01-18

2005-01-18

Smith, Matthew (Department: 2825)

Semiconductor device manufacturing: process

Miscellaneous

C269S021000, C204S297010

Reexamination Certificate

active

06844274

ABSTRACT:
A substrate holder holds a substrate while hermetically sealing an outer circumferential edge and a reverse side of the substrate and exposing a surface of the substrate. The substrate holder has a base and a cover having an opening defined therein and positioned to place the substrate between the base and the cover. An attracting mechanism couples the base and the cover to each other to hold the substrate between the base and the cover, with the surface of the substrate being exposed through the opening.

REFERENCES:
patent: 4682928 (1987-07-01), Foulke et al.
patent: 20020029963 (2002-03-01), Yoshioka et al.

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