Substrate holder having vacuum holding and gravity holding

Details Substrate holder having vacuum holding and gravity holding Substrate holder having vacuum holding and gravity holding

1997-07-08

2000-09-26

Morse, Gregory A.

Material or article handling

Load carried along a horizontal linear path

Having gripper means

901 49, 414941, 4147445, 414800, G03F 720

Patent

active

061235024

ABSTRACT:
A substrate processing apparatus having a substrate transport with substrate holders. The holders are adapted to vacuum hold substrates and thereby allow for rapid movement of the substrates without risk that the substrates will move off of the holders. If vacuum holding of a substrate on a holder fails, the movement of the substrate holder is automatically changed to provide a less rapid gravity only holding of the substrate on the holder.

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patent: 4653793 (1987-03-01), Guinot et al.
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patent: 4813742 (1989-03-01), Klem
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patent: 4951601 (1990-08-01), Maydan et al.
patent: 5180276 (1993-01-01), Hendrickson
patent: 5622400 (1997-04-01), George

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