Substrate holder for liquid phase epitaxial growth

Coating apparatus – Immersion or work-confined pool type – With means for moving work through – into or out of pool

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118500, 118501, B05C 1302, B05C 500, B05C 302, B05C 3109

Patent

active

043544533

ABSTRACT:
A substrate holder for liquid phase epitaxial growth comprising

REFERENCES:
patent: 1941941 (1934-01-01), Irwin
patent: 2462218 (1949-02-01), Olsen
patent: 3737282 (1973-06-01), Hearn et al.
patent: 3859148 (1975-01-01), Dawson et al.
patent: 3918756 (1975-11-01), Saville et al.
patent: 3974797 (1976-08-01), Hutson
patent: 4176751 (1979-12-01), Gillissie
Geany et al., IBM Technical Disclosure Bulletin, vol. 19, No. 6, Nov. 1976.

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