Substrate holder and exposure apparatus having the same

Details Substrate holder and exposure apparatus having the same Substrate holder and exposure apparatus having the same

2007-06-27

2010-11-16

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000, C414S783000

Reexamination Certificate

active

07834982

ABSTRACT:
A substrate holding apparatus including a first holding member for attracting a first surface of a substrate, a second holding member which contacts a second surface, opposite to the first surface, of the substrate, in which the second holding member attracts the second surface, and a forcing member for forcing the first holding member toward the second holding member.

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Japanese Office Action dated Feb. 4, 2009, issued in corresponding Japanese patent application No. 2003-372036.
English translation of Japanese Office Action dated Feb. 4, 2009, issued in corresponding Japanese patent application No. 2003-372036.
Abstract for Japanese publication No. 04-010452.
Japanese Office Action dated Apr. 9, 2008, issued in corresponding Japanese patent application No. 2003-372036, with an English translation.

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