Substrate holder and exposure apparatus having the same

Details Substrate holder and exposure apparatus having the same Substrate holder and exposure apparatus having the same

2007-11-13

2007-11-13

Fuller, Rodney (Department: 2862)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000

Reexamination Certificate

active

10972497

ABSTRACT:
A substrate holding apparatus including a first holding member for attracting a first surface of a substrate, a second holding member which contacts a second surface, opposite to the first surface, of the substrate, in which the second holding member attracts the second surface, and a forcing member for forcing the first holding member toward the second holding member.

REFERENCES:
patent: 5842690 (1998-12-01), Lee et al.
patent: 6414744 (2002-07-01), Kuiper et al.
patent: 9-270383 (1997-10-01), None
patent: 2862632 (1998-12-01), None
patent: 2000-349022 (2000-12-01), None
patent: 2001-156151 (2001-06-01), None

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