Substrate holder and device manufacturing method

Details Substrate holder and device manufacturing method Substrate holder and device manufacturing method

2005-08-03

2009-02-24

Toledo, Fernando L (Department: 2895)

Semiconductor device manufacturing: process

With measuring or testing

C438S015000, C438S016000, C438S017000, C438S018000, C438S943000, C438S946000, C355S078000, C355S095000, C355S099000, C355S053000

Reexamination Certificate

active

07494828

ABSTRACT:
A second substrate, e.g. a III/V compound semiconductor, is placed on a first substrate, e.g. a wafer, in the vicinity of placement marks on the first substrate. The second substrate is exposed to patterned radiation, e.g. for the manufacture of integrated circuits.

REFERENCES:
patent: 6583858 (2003-06-01), van Schaik et al.
patent: 6822730 (2004-11-01), Krikhaar et al.
patent: 2005/0094120 (2005-05-01), Sekigawa et al.
patent: 2007/0111116 (2007-05-01), Noudo et al.
patent: 2007/0128556 (2007-06-01), Hasegawa et al.
U.S. Appl. No. 11/170,735, filed Jun. 30, 2005.

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