Substrate height position detecting apparatus wherein a stop pla

Details Substrate height position detecting apparatus wherein a stop pla Substrate height position detecting apparatus wherein a stop pla

1994-11-01

1996-10-29

Allen, Stephone

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

250548, 355 53, G01N 2186

Patent

active

055699308

ABSTRACT:
To detect the height position of a substrate, a stop-plate having a plurality of slits applies light beams of elongated cross-section to the substrate obliquely. A sensor having a plurality of sensor elements receives light beams reflected from the substrate and outputs signals for controlling the height of the substrate. Additional light beams and sensor elements may be provided to output information regarding the direction of height deviation and the amount of height deviation.

REFERENCES:
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patent: 4681430 (1987-07-01), Goel et al.
patent: 4814829 (1989-03-01), Kosugi et al.
patent: 4993837 (1991-02-01), Oshida et al.
patent: 4999669 (1991-03-01), Sakamoto et al.
patent: 5008705 (1991-04-01), Sindledecker
patent: 5101226 (1992-03-01), Beaulieu et al.
patent: 5118957 (1992-06-01), Kawashima et al.
patent: 5298939 (1994-03-01), Swanson et al.

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