Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2006-06-13
2006-06-13
Fuqua, Shawntiná (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S405000, C219S411000, C392S416000, C392S418000, C118S724000, C118S725000, C118S050100, C118S728000, C118S715000
Reexamination Certificate
active
07060939
ABSTRACT:
A substrate on which a resist solution is applied is mounted on a heating plate in a processing vessel. Then, a purge gas is supplied into the processing vessel, and heating is started. Above the mounting position of the substrate, a thickness detecting sensor for monitoring the thickness of the resist film formed on the surface of the substrate is provided. When the thickness becomes a predetermined value or less, a control part causes a lift pin to upwardly move so as to increase the distance between the substrate and the heating plate. Thus, the heating value applied to the substrate decreases, and thereafter, only the solvent is volatilized without having a bad influence on a polymer in the resist film.
REFERENCES:
patent: 6140256 (2000-10-01), Ushikawa
patent: 6203969 (2001-03-01), Ueda
patent: 6419803 (2002-07-01), Baldwin et al.
patent: 6709523 (2004-03-01), Toshima et al.
patent: 6829559 (2004-12-01), Bultman et al.
patent: 3-135011 (1991-06-01), None
Kitano Takahiro
Shinya Hiroshi
Fuqua Shawntiná
Tokyo Electron Limited
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