Substrate heating device

Details Substrate heating device Substrate heating device

2007-03-13

2007-03-13

Paik, Sang (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S544000

Reexamination Certificate

active

11102462

ABSTRACT:
A substrate heating device is provided, including a ceramic base plate having a heating surface on which a substrate is placed, resistance heating elements buried in the ceramic base plate corresponding to a plurality of zones into which the heating surface is divided, terminals respectively connected to the resistance heating elements, and lead wires respectively connected to the terminals and wired on an outer surface of the ceramic base plate other than the heating surface.

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patent: 2004/0206746 (2004-10-01), Zhou
patent: 2005/0045618 (2005-03-01), Ito
patent: 2001-052843 (2001-02-01), None
patent: 2003-077783 (2003-03-01), None
patent: 526671 (2003-04-01), None
patent: 569643 (2004-01-01), None

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