Substrate heating apparatus with glass-ceramic panels and thin f

Details Substrate heating apparatus with glass-ceramic panels and thin f Substrate heating apparatus with glass-ceramic panels and thin f

1997-06-25

1999-06-15

Walberg, Teresa

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

392418, 118725, 118728, C23C 1600, H05B 316, H05B 326

Patent

active

059118962

ABSTRACT:
A substrate heating apparatus having a housing forming a substrate receiving chamber and a heater located inside the chamber. The heater has a thin film flat ribbon heater element sandwiched between two glass-ceramic panels.

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