Substrate heating apparatus with cantilevered lifting arm

Details Substrate heating apparatus with cantilevered lifting arm Substrate heating apparatus with cantilevered lifting arm

1996-01-25

1998-12-29

Nappi, Robert E.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219390, 20429825, H05B 368, F27B 514, C23C 1400

Patent

active

058544682

ABSTRACT:
An apparatus for heating substrates having a frame forming a vacuum chamber, a heater, a lift mechanism and a lift arm. The lift arm has a general "Y" shape and is located in a groove in a top heat transfer surface of the heater. The lift arm extends out of the groove at a lateral side of the heater and is connected to the lift mechanism.

REFERENCES:
patent: 3973665 (1976-08-01), Giammanco
patent: 4208159 (1980-06-01), Uehara et al.
patent: 4534816 (1985-08-01), Chen et al.
patent: 4597736 (1986-07-01), Moffat
patent: 4923584 (1990-05-01), Bramhall, Jr. et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 4952299 (1990-08-01), Chrisos et al.
patent: 5013385 (1991-05-01), Maher et al.
patent: 5019233 (1991-05-01), Blake et al.
patent: 5060354 (1991-10-01), Chizinsky
patent: 5252807 (1993-10-01), Chizinsky

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