Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2007-07-24
2007-07-24
Paik, Sang (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S541000
Reexamination Certificate
active
11159820
ABSTRACT:
A substrate heating apparatus is provided, including a base group including a plurality of bases, which are arranged substantially into a plate with a gap interposed between the bases, and which form a substrate mounting surface. A resistance heating element provided for at least one of the bases.
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Goto Yoshinobu
Tsuruta Hideyoshi
Burr & Brown
NGK Insulators Ltd.
Paik Sang
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