Substrate heater utilizing protective heat sinking means

Details Substrate heater utilizing protective heat sinking means Substrate heater utilizing protective heat sinking means

1990-03-19

1992-06-30

Paschall, M. H.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219200, 219541, 219540, 219461, 219462, 439487, 439485, H01L 21203, H05B 318

Patent

active

051265338

ABSTRACT:
A substrate heater for the production of superconducting films utilizing a nickel alloy block uniformly heated with a resistance heating element fully immersed in a brazing material that fills a recess in the block. Massive electric power connectors surround the heating element leads outside the braze material so as to provide a protective heat sink therefor and also to mechanically strengthen the block against warpage.

REFERENCES:
patent: 1257106 (1918-02-01), Parkhurst
patent: 1378324 (1921-05-01), Clark et al.
patent: 1677005 (1928-07-01), Reichold
patent: 2290901 (1942-07-01), Weinhardt et al.
patent: 3382477 (1968-05-01), Peterson
patent: 3396361 (1968-08-01), Sussman
patent: 3627590 (1971-12-01), Mammel
patent: 4417347 (1983-11-01), Muka et al.
patent: 4593168 (1986-06-01), Amada
patent: 4703154 (1987-10-01), Ikegami et al.
patent: 4743570 (1988-05-01), Lamont, Jr.
RCA Technical Note #837, "Substrate Heater", May 16, 1969.

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