Substrate heater and heating element

Details Substrate heater and heating element Substrate heater and heating element

1989-05-16

1992-03-03

Walberg, Teresa J.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219390, 219411, F27B 514

Patent

active

050935577

ABSTRACT:
Heat is provided to substrates at a step of a process by providing identical movable heating devices, one for each substrate, placing each substrate onto one of the heating devices, sequentially moving each device into a position where the step of the process can be performed on the substrate, and causing each of the devices to provide heat to the substrate at each step of the process.

REFERENCES:
patent: 3391270 (1968-07-01), Harris et al.
patent: 4334819 (1982-06-01), Hammerslag
patent: 4449037 (1984-05-01), Shibamata et al.
patent: 4470369 (1984-09-01), Edgerton
patent: 4487161 (1984-12-01), Hirata et al.
patent: 4493977 (1985-01-01), Arai
patent: 4579080 (1986-04-01), Martin et al.
patent: 4634375 (1987-01-01), Hailey
patent: 4649261 (1987-03-01), Sheets
patent: 4673799 (1987-06-01), Mahawili
patent: 4778559 (1988-10-01), McNeilly
Goldmann, L. S., "Auxiliary Heater for Belt Furnace", IBM Tech. Disc. Bull., vol. 25, No. 5, Oct. 1982, pp. 2299-2300.
Furnace Products brochure, "Kanthal AF", no date listed.
"Haynes International" brochure, Haynes Alloy No. 214, no date listed.
Thermionics, "Sample Handling in Vacuum", no date listed.

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