Substrate heater and fabrication method for the same

Details Substrate heater and fabrication method for the same Substrate heater and fabrication method for the same

2006-06-13

2006-06-13

Fuqua, Shawntina (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S443100, C219S465100, C219S543000, C219S546000, C219S390000, C219S405000, C219S466100, C392S416000, C392S418000, C118S724000, C118S725000, C118S050100, C118S728000, C118S729000, C118S730000

Reexamination Certificate

active

07060945

ABSTRACT:
A substrate heater is provided including a plate-shaped ceramic base having a first side defining a convex heating surface on at least a portion of which a substrate is placed, a resistance-heating element embedded in the ceramic base, and a tubular member joined to a central portion on an opposed second side of the ceramic base. The convex heating surface has a central portion and a peripheral portion, wherein the height of the heating surface decreases from the central portion toward the peripheral portion thereof.

REFERENCES:
patent: 6534751 (2003-03-01), Uchiyama et al.
patent: 6730175 (2004-05-01), Yudovsky et al.
patent: 2002-083858 (2002-03-01), None

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