Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2005-10-18
2010-06-08
Fuqua, Shawntina (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S405000, C219S411000, C392S416000, C392S418000, C118S724000, C118S725000, C118S050100, C118S728000, C118S729000
Reexamination Certificate
active
07732739
ABSTRACT:
A degassing from a susceptor heated at a high temperature in a vacuum atmosphere is suppressed. The susceptor is disposed between a heater and a substrate and partitions a space in the chamber into a first chamber space where the heater is placed and a second chambers space where the substrate is placed, and the surface of the susceptor facing the second chamber space is coated with a pyrolytic carbon layer (15) of thickness of 10 μm to 50 μm.
REFERENCES:
patent: 5881208 (1999-03-01), Geyling et al.
patent: 2006/0249073 (2006-11-01), Asaoka et al.
patent: 0 519 608 (1992-12-01), None
patent: 1-145312 (1989-06-01), None
patent: H01-145312 (1989-06-01), None
patent: 404352678 (1992-12-01), None
patent: 10-144618 (1998-05-01), None
patent: 10-144618 (1998-05-01), None
patent: 2912913 (1999-06-01), None
patent: 2004-297034 (2004-10-01), None
patent: 2006-28625 (2006-02-01), None
patent: 97/13011 (1997-04-01), None
*International Search Report dated Jan. 24, 2006.
Kurematsu Yasumi
Shibagaki Masami
Buchanan & Ingersoll & Rooney PC
Canon Anelva Corporation
Fuqua Shawntina
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