Substrate heat-treating apparatus

Details Substrate heat-treating apparatus Substrate heat-treating apparatus

1991-09-30

1993-04-13

Yuen, Henry C.

Heating

Work chamber having heating means

Combustion products heat work by contact

432 5, 432241, F27B 304

Patent

active

052016536

ABSTRACT:
An apparatus for heat-treating substrates includes a plurality of heat-treating units arranged in vertical stages, and at least one hollow column for supporting the heat-treating units. Each heat-treating unit has an exhaust line communicating with the column to exhaust gases from the heat-treating units through the column by suction.

REFERENCES:
patent: 2191438 (1940-02-01), Breeler
patent: 3780674 (1973-12-01), Liu
patent: 4028048 (1977-06-01), Woolworth

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