Radiation imagery chemistry: process – composition – or product th – Liquid crystal process – composition – or product
Reexamination Certificate
2001-12-06
2004-04-13
Huff, Mark F. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Liquid crystal process, composition, or product
C430S009000, C430S311000, C430S313000, C430S319000, C430S320000, C430S321000, C430S322000
Reexamination Certificate
active
06720120
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a substrate having fine lines, and a method for manufacturing the same. Particularly, the invention relates to a configuration in which the fine lines are wires provided on the substrate, and a configuration in which a technique for providing the fine lines are applied to an electron-source substrate and an image forming apparatus.
2. Description of the Related Art
FIG. 14A
is a plan view illustrating a surface-conduction-type electron emitting device.
FIG. 14B
is a cross-sectional view taken along line B-B′ shown in FIG.
14
A. In
FIGS. 14A and 14B
, there are shown an insulating substrate
2
, a conductive film
15
, electrodes
11
and
12
, and an electron emitting portion
16
.
FIG. 15
is a schematic diagram illustrating the configuration of an image display apparatus which uses electron emitting devices
100
, each such as the one shown in
FIGS. 14A and 14B
. In
FIG. 15
, there are shown a substrate
151
, an external frame
152
, and a faceplate
156
having an image forming member
154
disposed thereon.
An envelope (air-tight container)
157
for maintaining the inside of the image display apparatus in a vacuum by sealing respective connecting portions between corresponding ones of the external frame
152
, the substrate
151
and the faceplate
153
using a bonding material (not shown), such as a low-melting-point glass frit or the like, is provided.
A substrate
158
is fixed on the substrate
151
. The electron emitting devices
100
whose number equals N×M (N and M are positive integers equal to or more than 2, appropriately selected in accordance with the number of pixels for displaying an image) are formed by being arranged on the substrate
158
. Each of the electron emitting devices
100
is connected to corresponding ones of wires
159
and
160
, each made of a conductive film.
In
FIG. 15
, M column-direction wires
159
and N row-direction wires
106
(also called “matrix wires”) are provided. Insulating layers (not shown) are provided at intersections of the row-direction wires
160
and the column-direction wires
159
, so that the row-direction wires
160
are insulated from the column-direction wires
159
.
In order to form the above-described image display apparatus, it is necessary to form and arrange a large number of row-direction wires
160
and column-direction wires
159
.
In order to form and arrange a large number of thick row-direction wires
160
and column-direction wires
159
, for example, Japanese Patent Application Laid-Open (Kokai) No. 8-34110 (1996) discloses a method of using a printing technique which is relatively inexpensive, does not require a vacuum apparatus and the like, and can deal with a large area.
In addition to the above-described surface-conduction-type electron emitting devices, for example, spindt-type electron emitting devices, each having a cone-shaped electron emitting portion, and MIM(metal-insulator-metal)-type electron emitting devices have been known as the electron emitting devices. By being combined with a phosphor emitting light by electrons emitted from an electron emitting device, the electron emitting device can be used as an image display device. In addition to the above-described electron emitting devices, for example, EL (electroluminescent) devices have been known as image display devices. A configuration in which an image is displayed by using very small integrated mirrors as image display devices and controlling reflection of light by the very small mirrors has also been known. A configuration in which an image is displayed using liquid-crystal devices as image display devices has also been practically used widely.
Japanese Utility Model Application Laid-Open (Kokai) No. 5-38874 (1993) discloses another background technique. This application discloses a technique in which in order to connect two conductive films facing each other, resistive films are superposed on respective end portions of the two conductive films. Particularly, in order to prevent growth of cracks in each of the resistive films at a step portion of superposition into a single large crack, the end portion of the conductive film is formed with a crooked line comprising lines or curves, having a saw-tooth shape, a comb-like shape, a wavy shape or the like.
SUMMARY OF THE INVENTION
The inventors of the present invention have studied a configuration in which, when forming fine lines on a substrate, the fine lines are obtained according to exposure and development. More specifically, a photosensitive material is used for forming fine lines, and the fine lines are obtained by selectively exposing predetermined regions followed by development. The studies by the inventors of the present invention have cleared that fine lines obtained according to this approach tend to peel from the substrate particularly at end portions of the fine lines in the longitudinal direction.
According to the present invention, the problem that fine lines are peeled when an exposure/development process is included in processes for forming the fine lines is solved.
That is, in a substrate including fine line, the fine line is obtained according to a fine-line forming process including a process of projecting light from above the substrate onto predetermined region on a photosensitive material provided on the substrate and a developing process after the light projection process. A narrow-width portion is provided at an end portion of the fine line in a longitudinal direction of the fine line. A width of the narrow-width portion is smaller than a width of a portion adjacent to the narrow-width portion.
According to the invention, it is possible to suppress peeling of end portions peculiar to fine lines formed according to the fine-line forming process including the exposure process and the developing process.
The following two configurations have been known as configurations in which unnecessary portions are removed by forming a latent image by projecting light onto predetermined regions and developing the latent image. Both of the two configurations may be applied to the present invention. In one of the two configurations, a latent image is formed by portions where light having an intensity sufficient enough for forming a latent image has been projected, and portions where light having an intensity insufficient for forming a latent image has been projected are removed by development. In another configuration, a latent image is formed by portions other than portions where light having an intensity sufficient enough for being removed by development has been projected, and portions other than portions where the latent image is formed are removed by development. The latent image in this specification corresponds to portions which are not removed even by development, and therefore is not limited to an invisible image.
The present invention is particularly suitable when the fine line is obtained by being heated after the developing process, because it is considered that a stress generated when the size of the material obtained by development changes due to the heating is a great factor for peeling of end portions. The present invention is particularly suitable when the fine line obtained by the heating has a width smaller than a width of the material after the developing process and before the heating.
The present invention is particularly suitable when the fine line obtained by the heating has a thickness equal to or more than 5 &mgr;m.
The present invention is particularly suitable when the material immediately before projecting the light has a thickness equal to or more than 8 &mgr;m.
The fine line according to the present invention may be suitably adopted as wire.
The present invention is particularly suitable when the material is a metal paste, or when silver is contained as a main component for providing a conductive property.
A configuration in which the end portion has a cut provided from a distal end of the end portion such that the end portion is divided i
Ishiwata Kazuya
Kubo Shinsaku
Uda Yoshimi
Watanabe Yasuyuki
Barreca Nicole
Huff Mark F.
LandOfFree
Substrate having fine lines, method for manufacturing the... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Substrate having fine lines, method for manufacturing the..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate having fine lines, method for manufacturing the... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3265680