Substrate having an active element array with low hydroxyl and c

Details Substrate having an active element array with low hydroxyl and c Substrate having an active element array with low hydroxyl and c

1993-01-27

1994-09-20

Sikes, William L.

Optical: systems and elements

Holographic system or element

Using a hologram as an optical element

359 62, 501900, 501 54, G02F 11333

Patent

active

053494563

ABSTRACT:
A synthetic quartz glass substrate (1) supporting active elements is formed of high-purity synthetic quartz glass having, a hydroxyl group content of 200 ppm or below and chlorine group content of 50 ppm or below. The substrate (1) may have an impurity level of 1 ppm or less sodium and 1 ppm or less aluminum. TFTs (6), i.e., active elements, and picture element electrodes (7) are formed on the surface of the synthetic quartz glass substrate (1) to construct a driving panel for a liquid crystal display of an active matrix type. A liquid crystal panel is formed by disposing the driving panel and a counter substrate (2) opposite to each other and sandwiching a liquid crystal layer (3) between the driving panel and the counter substrate (2).

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Chemical Abstracts, vol. 113, No. 6, Aug. 6, 1990, Columbus, Ohio US; Abstract No. 45194j, Yokogawa "Ultraviolet Radiation-Resistent Synthetic Quartz Glass and Its Manufacture", p. 276; & JP-A-280 343.

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