Substrate having a V-shaped groove of a special configuration in

Details Substrate having a V-shaped groove of a special configuration in Substrate having a V-shaped groove of a special configuration in

1991-12-27

1993-12-28

Loney, Donald J.

Stock material or miscellaneous articles

Structurally defined web or sheet

Including variation in thickness

428156, 428192, B32B 300

Patent

active

052738078

ABSTRACT:
A V-shaped groove having a rugged outline is formed in the substrate. A plurality of element regions in the substrate are isolated from one another by the V-shaped groove. A projection or a recess of said V-shaped groove satisfies the condition L.sub.n .multidot.tan.theta.<W.sub.n and L.sub.n .multidot.tan.theta.<D, where L.sub.n represents the length of a projection edge or a recessed edge of the top portion of said V shaped groove, W.sub.n represents the width of the projection or the recess , D represents the depth of the V-shaped groove, and .theta. represents an error between said substrate and a mask formed on said substrate to obtain said V-shaped groove. As a result, the distance between a corner of the mask and the corresponding top edge of the V-shaped groove is minimized, and the area of the element region is maximized.

REFERENCES:
patent: 3615149 (1971-10-01), Malone et al.
patent: 4663204 (1987-05-01), Langham

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